The substrate processing unit 3 includes a substrate transport robot 31 for transporting the substrates W transferred from the pushing-out part 25; a plurality of cleaning parts 32 for cleaning the substrates W by dipping them into processing fluid as well as receiving and transferring the substrates W from and to the substrate transfer robot 31; and a drying part 33 for drying the cleaned substrates W as well as receiving and transferring the substrates W from and to the substrate transport robot 31.