The exclusive carrier EC supports a plurality of substrates W by racks Nb as shown in FIGS. 4A and 4B, and can be used in either way to hold the substrates W in a horizontal attitude with a surface Sf1 as its bottom surface or to hold the substrates W in a vertical attitude with a surface Sf2 as its bottom surface. Further, the exclusive carrier EC has a forward opening part Eb1 and a backward opening part Eb2 opposing each other. Though the same as the common carrier SC in that the substrates W are transferred through the forward opening part Eb1 as indicated by an arrow Db1, the exclusive carrier EC, having handles P used for the transport of the exclusive carrier EC, differs from the common carrier SC in shape. For the transfer of the substrates W from the common carrier SC to the exclusive carrier EC, the exclusive carrier EC stands on the turning part 23 with the surface Sf1 as its bottom surface and the forward opening Eb1 facing the carrier placing stage 221.