The substrate transport robot 31 has two holding plates 311 each extending in the Y direction separately as shown in FIGS. 1, 8A and 8B and rotatable on an axis 312 extending in the Y direction. The substrates W pushed out at the pushing-out part 25 are transferred between the holding plates 311, and the holding plates 311 rotate so as to hold the substrates W therebetween. In this way, the substrates W are held by the substrate transport robot 31 as shown in FIG. 8B. Namely, the pushing-out parts 25 act as relay stations for transferring the substrates W to the substrate processing unit 3. Each of the holding plates 311 of the substrate transport robot 31 has grooves (abutting on the exterior of the substrates W) provided for each of the substrates W to hold the substrates W in the vertical attitude.