In the substrate processing apparatus 1b, a common carrier SC holding the substrates W in a horizontal attitude is placed on a carrier placing stage 221 of the common carrier placing part 22. As in the second preferred embodiment, the substrate transfer robot 21 transfers the substrates W into a carrier part FC of the turning and pushing-out part 27, where the substrates W are turned into a vertical attitude, and pushed up after rotated in a predetermined way.