After the transfer of the substrates W is complete, the substrates W are turned from the horizontal attitude to a vertical attitude together with the exclusive carrier EC at the turning part 23. More specifically, since the exclusive carrier is placed on a turning stage 231 as shown in FIGS. 1, 7A and 7B, when the turning stage 231 turns 90 degrees around an horizontal axis 231C extending in the Y direction by a turning driving source (not shown) as indicated by an arrow 231R, the exclusive carrier EC turns from its horizontal storage position H at which the substrates W are held in a horizontal attitude as shown in FIG. 7A to its vertical storage position S at which the substrates W are held in a vertical attitude as shown in FIG. 7B (see FIG. 2). Along with the exclusive carrier EC, the substrates W held in the horizontal attitude as shown in FIG. 7A turn into a vertical attitude as shown in FIG. 7B. At this time, the bottom surface of the exclusive carrier EC changes from the surface Sf1 to the surface Sf2 shown in FIG. 4 This operation is also indicated by the arrow 231R in FIG. 2.