The carrier placing unit 2 includes a substrate transfer robot 21 for transferring the substrates W from the common carrier SC to an exclusive carrier EC used inside the apparatus 1; a common carrier placing part 22 where the common carrier SC transferred into the apparatus 1 is placed; a turning part 23 for turning the exclusive carrier EC; an exclusive carrier transport robot 24 for transporting the exclusive carrier EC; a pushing-out part 25 where the exclusive carrier EC transported by the exclusive carrier transport robot 24 is placed and the substrates W are received and transferred from and to the substrate processing unit 3; and a carrier cleaning part 26 for cleaning the exclusive carrier EC.