The substrate transfer robot 21 has a plurality of holding plates 211 provided for each of the substrates W held in the common carrier SC as shown in FIG. 5A, and a driving source 212 for moving the holding plates 211 (see FIG. 1). As shown in FIGS. 5B and 5C, the robot 21 moves up the holding plates 211 so as to lift the substrates W held in the common carrier SC, and transfers the substrates W into the exclusive carrier EC.