For the transfer of the substrates W from the common carrier SC to the carrier part FC, the carrier part FC stands, as shown in FIG. 11A, at its horizontal storage position H with the substrates W held therein in a horizontal attitude. Thus, the carrier part FC and the common carrier SC are arranged in the similar way to the exclusive carrier EC and the common carrier SC shown in FIG. 5A, so that the substrate transfer robot 21 can transport the substrates W from the common carrier SC to the carrier part FC.