The substrate processing apparatus 1a roughly consists of a carrier placing unit 2a and a substrate processing unit 3a. The carrier placing unit 2a includes a substrate transfer robot 21, a common carrier placing part 22, and a turning and pushing-out part 27. The substrate processing unit 3a includes a substrate transport robot 31, a cleaning part 32, and a drying part 33. The components except the turning and pushing-out part 27 are almost the same as those of the substrate processing apparatus 1 according to the first preferred embodiment.