Upon receipt of the substrates W, the substrate transport robot 31 transports the substrates W to the cleaning part 32, where the substrates W are cleaned and returned to the substrate transport robot 31. Then, the substrate transport robot 31 transports the substrates W to the drying part 33, where the substrates W are dried and returned to the substrate transport robot 31. The substrates W are then transported to the turning and pushing-out part 27 by the substrate transport robot 31 and returned to the common carrier SC. Namely, the substrates W held in the vertical attitude turns into a horizontal attitude and returned to the common carrier SC in reverse order to how they are transferred into the apparatus 1a and transported to the substrate transport robot 31.