Each of the pushing-out parts 25 has a rotary stage 251 rotatable on an axis extending in the Z direction as shown in FIG. 8A, and a pushing stage 252 vertically movable in the Z direction. The exclusive carriers placed on the respective pushing stages 252 rotates 90 degrees on an axis extending in the Z direction as indicated by an arrow 25R in FIG. 2, by which a normal of the main surfaces of the substrates W held in the exclusive carriers EC (a line perpendicular to the surfaces of the substrates W) turns in the Y direction.