After the normal of the substrates W (a line perpendicular to the surfaces of the substrates W) turns in the Y direction, the substrates W are pushed up by the pushing stage 252 as in the first preferred embodiment. Then, the two pushing stages 252 approach each other in the axial Y direction to lessen the space between the groups of the substrates W thereon. The substrates W are then transferred to the substrate transport robot 31. As shown in FIG. 10, two turning and pushing-out parts 27 are arranged in the Y direction, and transfer the substrates W thereon to the substrate transport robot 31 at the same time. Further, since the pushing stage 252 pushes up the substrates W, like the exclusive carrier EC of the first preferred embodiment, the carrier part FC has a backward opening part Ec2 opposing to a forward opening part Ec1 for the entrance of the substrates W as shown in FIG. 11C. Also, the turning stage 231 has an opening part 231E for the entrance of the pushing stage 252 in a corresponding position to the backward opening part Ec2.