As described above, in the substrate processing apparatus 1a according to the present invention, a plurality of substrates W are turned at a time together with the carrier part FC and transferred from and to the substrate transport robot 31 at the turning and pushing-out part 27. This allows a speedy and simple turn of the substrates W inside the apparatus. Further, such a simple mechanism suppresses generation of particles, thereby improving the substrates W in quality. Furthermore, forming the turning stage 231 on the rotary stage 251 downsizes the apparatus as a whole.