Upon receipt of the substrates W from the pushing-out parts 25, the substrate transport robot 31 transports the substrates W to either one of the cleaning parts 32 not in process. As shown in FIGS. 1 and 2, each of the cleaning parts 32 has a dipping bath 321 for retaining processing fluid for cleaning, and a vertical moving robot 322 which is vertically movable with the substrates W on a holding stage 322a. The vertical moving robot 322 moves up the holding stage 322a to receive the substrates W from the substrate transport robot 31, while the substrate transport robot 31 rotates the holding plates 311 holding the substrates W therebetween to release the substrates W. Thus, the released substrates W are held on the holding stage 322a of the vertical moving robot 322. The holding stage 322a also has a plurality of grooves to hold the substrates W in the vertical attitude.