Following the turn of the exclusive carrier, two of a plurality of exclusive carriers EC on the turning part 23 are transported by the exclusive carrier transport robot 24 to two pushing-out parts 25 arranged in the Y direction, respectively. The exclusive carrier transport robot 24 is movable in the Y direction as indicated by an arrow 24Y in FIG. 2, rotatable on an axis extending in the Z direction as indicated by an arrow 24R, and further vertically movable in the Z direction. Held by the handles P shown in FIG. 4, the exclusive carriers EC are transported from the turning stage 231 to the pushing-out parts 25.