The substrates W pushed up at the turning and pushing-out part 27 are transferred to the substrate transport robot 29 which, as shown in FIG. 13, holds the substrates W by two arms 291 which are rotatable on two axes 29C each extending in the Y direction, as indicated by arrows 29R. Since the axes 29C move so as to extend in the Y direction, the substrates W are transportable in the Y direction. Further, grooves are formed where the arms 291 abut on the substrates in order to hold the substrates W in the vertical attitude.