The substrate transfer apparatus 2d comprises a substrate transfer robot 21, a common carrier placing part 22, and a turning part 23, and these structures and operations are almost similar to those of the substrate processing apparatus 1 of the first preferred embodiment. More specifically, the substrate transfer robot 21 has a plurality of holding plates 211 movable in the X and Z directions by a driving source 212. Using the holding plates 211, the substrates W are transferred between a common carrier SC placed on a carrier placing stage 221 of the common carrier placing part 22 and an exclusive carrier EC placed on the turning part 23.