Fabrication and characterization of Co-Ni magnetic cantilevers
This work is focused on the fabrication of silicon cantilevers coated with magnetic material. An electrodeposited Co-Ni alloy has been used as a magnetic layer. The magnetic and mechanical properties are preliminary evaluated for the design of magnetic devices. The design and fabrication technology of cantilevers coated with Co-Ni films will be presented as an example of a magnetic actuator.