Micromachined WR-1.0 waveguide band-pass filter
A WR-1.0 waveguide band-pass filter is designed and fabricated using the deep reactive ion etching (DRIE) micromachining technique. The metal conductivity is investigated for more accurate designs. Because the influence of the fabrication tolerance on the component performance cannot be negligible while the frequency increases, it is a necessary to adopt the simple structure with less resonant cavities for obtaining the given performance. Therefore, the filter in this letter is designed based on the TE103/TE202 dual-mode rectangular waveguide resonant cavities. The measured center frequency is at about 862 GHz with the bandwidth of 44GHz and the best insertion loss is about 2.9 dB. The effect of the DRIE micromachining process on the performance of the filter is also analyzed.