Piezoresistive cantilever for measuring mass of airborne particles
This paper introduces a piezoresistive cantilever that is designed for measuring the mass of airborne particles. The principle of mass measurement is based on measuring the frequency shift in the mechanical resonant frequency due to an additional mass deposited on the cantilever. To detect the resonant frequency, piezoresistors are fabricated on the surface of the cantilever and utilized as a strain gauge. Excitation of the cantilever is provided by an external PZT stack. Preliminary results on sensor characterization and discussion are also given in the paper.