A MEMS sensor array for explosive particle detection
In this work, a micro-electro-mechanical system (MEMS) sensor array which is capable of detecting explosive particles has been designed and fabricated. The array consists of 12 silicon beams, on each beam there are a heater and a temperature sensor. AH silicon beams can be heated up to melting point of particular kind of explosive by the heaters, while each sensor is used to measure the temperature change of each beam caused by heat absorption of the explosive particles when they melt Experimental results show that the array is capable of detecting trinitrotoluene (TNT) and cyclotrimethylenetrinitramine (RDX) samples as little as 1/spl mu/g.