Choice and fabrication of microspectrometer components
Spectrometers are basically composed of three components: (1) dispersive element; (2) detectors and (3) optical path. There are many ways to realize them. By analysis and comparison the optimal choice and fabrication process of the three components in microspectrometer is described. The choice of components must be considered overall from performance, complexity of fabrication and dimension scale of the full microspectrometer systems.