Nanostructured Metal–Insulator–Metal Metamaterials for Refractive Index Biosensing Applications: Design, Fabrication, and Characterization
Nanofabrication of nanostructured metal-insulator-metal metamaterial (NMIM2) by the electron beam lithography and the liftoff technique is reported in this paper. The NMIM2 consists of periodic arrays of gold (Au) nanotriangles deposited on a gold layer (acting as a mirror) separated by a thin dielectric insulator. Such an NMIM2 stack was fabricated on a silicon wafer. Reflection of the NMIM2 was measured by the Fourier transform infrared spectroscope. The experimental measurement for reflection coefficients are in good agreement with the full-wave finite-different time-domain simulation results. At resonance, we numerically observed a strong field localized inside the gap between the Au nanostructures and the Au mirror, resulting in a strong confinement of incoming light within the insulator spacer and, thus, a pronounced absorption at telecommunication wavelengths. This resonant spectral response is investigated for sensitive label-free refractive index biosensing applications.