12E-1 Accelerometer Based on Thin-Film Bulk Acoustic Wave Resonators
A MEMS accelerometer, its acceleration-sensing devices being FBARs, is described. The FBAR-based accelerometer is comprised by a movable, seismic mass, which is supported by one or more beams. Each beam embeds an FBAR or can be an FBAR by itself, whose resonant frequency changes when the beam bends due to the application of acceleration forces to the seismic mass. Due to mechanical coupling between the beams and the mass, the displacement of the latter produces a stress in the beams, which is transmitted to the FBAR low frequency and high frequency characterization of the resonant accelerometer has been carried out, a static-acceleration sensitivity of 250 kHz/g being found for the quad-beam, embedded-FBAR device.