A nano-g MEMS accelerometer for earthquake monitoring
This paper reports on an in-plane nano-g MEMS accelerometer using periodic-sensing-array capacitance displacement transducer. The parasitic capacitances and fringe effect are proved to have great influences on sensitivity by simulation. Benefiting from the large proof mass and optimized displacement transducers, the experimentally measured noise limited resolution is 30ng/√Hz at 1Hz, which is among the highest sensitivities reported to date. The earthquake occurred in Taiwan was detected during a continuous measurement.