Monolithic chip-to-chip WDM optical proximity coupler utilizing echelle grating multiplexer/demultiplexer integrated with micro mirrors built on SOI platform
We report the first monolithically integrated chip-to-chip WDM optical proximity coupler with 4-channel × 200GHz-spacing multiplexer/demultiplexer (MUX/DEMUX) functionality utilizing an echelle grating, micro reflective mirrors, and waveguide mode transformers on single silicon-on-insulator (SOI) substrate.