An Incremental Boundary Element Method for the Variation-Aware Library-Building Procedure of Capacitance Extraction
The variation of process parameters makes the number of geometry patterns in capacitance extraction increase for magnitudes, which brings a heavy burden to the library-building procedure. An incremental BEM solver is proposed for the variation-aware library-building. This method reuses the coefficient matrix and solution of the original pattern for the sequent computations for varied patterns. Numerical results show the proposed method is five times faster than the method just repeats the computation for all patterns, while preserving high accuracy