A novel preamplifier for MEMS microphone
MEMS microphone is used in various mobile devices, notebook applications, and hearing aids. This paper analyzes the electric model of the MEMS microphone elaborately and presents a preamplifier for MEMS Microphone. The preamplifier is realized in 0.18µm CMOS HV technology which provides high bias voltage, impedance match and weak signal preamplifying with an area of 1050µm*900µm. The post-layout simulation results show that it can operate under 1.5V∼3.6V with 56µVRMS equivalent input noise.