Nanomagnet fabrication on FBAR for magnetic sensor applications
We report a focused-ion-beam-assisted technique intended for ultra-small, hard magnet fabrication and placement on thin-film bulk acoustic resonators (FBAR). Reduced-size NdFeB magnets were extracted from a macroscopic quarry and bonded to the surface of FBARs by ion-beam-induced milling and deposition. Experimental measurements confirm the success of the method. S-parameter extraction was performed before and after nanomagnet attachment. Preliminary finite-element analysis has predicted force sensitivity at fundamental frequencies (kHz-MHz).