Improved methods for investigating boron related defects in 6H-SiC using deep level transient spectroscopy
A new covariance technique is introduced for parameter estimation of DLTS capacitance transients using Singular Value Decomposition and Prony's method (SVD-Prony). The SVD-Prony method is shown to be effective at Signal-to-Noise Ratio's (SNR's) above 6 dB. The algorithm is shown to accurately estimate the time constants associated with non single-exponential capacitance transients. This paper describes the software written to implement the algorithm using a multi-platform MATLAB Graphic User Interface (GUI). The software also has a wavelet preprocessing tool for SNR's less than 6 dB.