Manufacturable hybrid silicon array laser source using an interposer based back-end-of-the-line integration
We report a silicon interposer based 1×4 external-cavity hybrid III-V/Si laser array using a manufacturable back-end-of-the-line integration. All channels are individually-tunable and wavelength-stabilized with a threshold current of 14mA, output powers of >3mW, over 35dB side mode suppression ratio and less then 46kHz linewidth.