Design of a multi-purpose silicon integrated optical sensor
Describes the design of a multi-purpose optical sensor that can realize a variety of optical signal sensing and processing functions. The silicon space required for implementing the sensor is about 50 /spl mu/m/spl times/50 /spl mu/m with a fill-factor greater than 40%, using a single-poly dual-metal 1.0-/spl mu/m CMOS technology. One version of the proposed sensor has been fabricated using a single-poly CMOS technology without any extra process and is currently being tested in the laboratory.