A foundry fabricated surface-micromachined high-speed rotation sensor using wireless transmission
A novel MEMS surface-micromachined non-contact high-speed rotation sensor with total surface area under 4 mm/sup 2/ is now under development. Various versions of the sensor have been designed and were fabricated using the MCNC Multi-User MEMS Processes (MUMPs). This paper reports the initial characterization of the sensor and presents the results of transmitting the sensor data via a commercial wireless transmission chip. Initial results indicate that this piezoresistive sensor is capable of measuring rotation speeds from 1000 to 4000 rpm with linear output. The responsivity of the sensor is 3Hz/rpm in this region.